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Research

Powder Atomic Layer Deposition

Building catalysts atom by atom: powder ALD to minimize metal loading and optimize the nanostructure of ammonia-decomposition catalysts.

  • Catalysis
  • Reactor Systems
  • Code
Powder Atomic Layer Deposition schematic

Background

Powder ALD builds a catalyst one atomic layer at a time on every particle. The aim is to control catalyst microstructure — minimizing metal loading and optimizing the nanostructure of ammonia-decomposition catalysts. Next comes a multi-precursor process: metal and oxide layers from a single recipe.

What I did

  • Developing powder ALD for ammonia-decomposition catalysts, from process design to operation.
  • Designed the multi-precursor process — chose, sourced and installed the precursors.
  • Reconfiguring the system around it: a new oxidant line and a rotating-drum powder holder.
  • Took control of the tool in-house — my own equipment control software runs it as a live, two-way digital twin (see Code).

Where it stands

  • In-house control verified on the live tool: pressure within ±0.0002 Torr, temperatures within ±0.21 °C across all ten zones.
  • All 168 legacy recipes carried over.
  • Next: the first full recipe run, then the multi-precursor process once the oxidant line is in.

The control software is on the Code page as equipment-control, in the Lab Digital Twin group.